With an optimal selection of parameters, burnished micro spherical stylus tips in variety diameters can be produced instantaneously. This process is particularly for production of micro ball-end stylus tips with diameters smaller than 0.1mm which are not available by conventional machining processes. With further research into probing systems, μ-CMM in the near future will be capable of measuring such micrometer-sized products as micro molds, micro dies and micro holes more precisely.
1. Background
During the previous decade, the trend towards the miniaturization of complex commercial micro products has led to an increased need for high-precision machining, assembling and measuring devices. As the accuracy of micro products increases, so does the need for highly accurate 3D measurements. The most reliable way to measure the size, form and space position of 3D components is through use of a ball-ended, contact touch-probe measurement system such as a coordinate measurement machine (CMM).
A new range of high-accuracy micro CMMs has recently been developed that are capable of measuring micro-scale features on millimeter-sized objects [1]. Commercial literature commonly states that these instruments can be used to measure the structure of micro-electro-mechanical systems (MEMS). However, the majority of commercially available micro CMMs incorporate stylus tips with diameters in the order of 0.12 mm, as determined by the availability of high-quality ruby spheres used for the ball tip, and this makes them incapable of measuring many MEMS structures such as deep micro trenches with high aspect ratio lateral side-walls, and micro nozzles for diesel or spark ignition engines. Therefore, one of the key factors required to achieve micro metrology by µ-CMM will be the availability of high-quality, micro ball-ended stylus tips.
During the previous decade, the trend towards the miniaturization of complex commercial micro products has led to an increased need for high-precision machining, assembling and measuring devices. As the accuracy of micro products increases, so does the need for highly accurate 3D measurements. The most reliable way to measure the size, form and space position of 3D components is through use of a ball-ended, contact touch-probe measurement system such as a coordinate measurement machine (CMM).
A new range of high-accuracy micro CMMs has recently been developed that are capable of measuring micro-scale features on millimeter-sized objects [1]. Commercial literature commonly states that these instruments can be used to measure the structure of micro-electro-mechanical systems (MEMS). However, the majority of commercially available micro CMMs incorporate stylus tips with diameters in the order of 0.12 mm, as determined by the availability of high-quality ruby spheres used for the ball tip, and this makes them incapable of measuring many MEMS structures such as deep micro trenches with high aspect ratio lateral side-walls, and micro nozzles for diesel or spark ignition engines. Therefore, one of the key factors required to achieve micro metrology by µ-CMM will be the availability of high-quality, micro ball-ended stylus tips.
